About: http://webisa.webdatacommons.org/366896342

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this manner, the microstructured or nanostructured component, for example a semiconductor chip, is produced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr