About: http://webisa.webdatacommons.org/366944522

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a photolithography step for providing a mask for the cutting step (a step of masking a region other than a region to be cut), the mask is aligned with respect to an underlying gate electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com