About: http://webisa.webdatacommons.org/366983065

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In general, to form a film, these photosensitive resin precursor compositions are applied onto a substrate, such as a silicon wafer or glass, by spin coating and heated to evaporate the solvent.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com