| http://www.w3.org/ns/prov#value | - Microelectromechanical modulators include devices such as grating light valves (GLVs), developed by Silicon Light Machines, Sunnyvale, Calif. and described in U.S. Pat. No. 5,311,360 (Bloom et al.) and electromechanical conformal grating devices as disclosed in U.S. Pat. No. 6,307,663 (Kowarz).
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