| http://www.w3.org/ns/prov#value | - FIG. 28a shows a starting structure and it comprises a substrate 51a of a heat-resistant material such as ceramics and glass and a metal film 51b formed on the substrate 51a from a metal such as Ta2 N, SiC, NiCr and Pt by thin film forming technology well known to one skilled in the art.
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