About: http://webisa.webdatacommons.org/367612559

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 4, wherein the planarizing solution having an oxidizer and buffer is a planarizing solution without substantially including an agent to operate as an etching agent.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es