About: http://webisa.webdatacommons.org/367670187

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following is a detailed explanation of the preferred embodiments of the plasma processing apparatus according to the present invention, given in reference to the attached drawings.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com