About: http://webisa.webdatacommons.org/367715354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This process can be etching of a semiconductor or other substrate, such as silicon or polysilicon; stripping or removal of organic photoresist layers from a substrate; or other similar
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com