About: http://webisa.webdatacommons.org/367719787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, what is desired is a system which improves the performance of a polishing pad in a CMP machine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com