About: http://webisa.webdatacommons.org/367872282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a transport system and a method for controlling the system, in particular to an automatic wafer storage system and a method for controlling the system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com