About: http://webisa.webdatacommons.org/367981316

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The oxide layer 104 is patterned using a mask and areas are etched away, including parts of the thin oxide 103, to leave linear construction pedestals 104 on top of the thin oxide 103.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com