About: http://webisa.webdatacommons.org/368019315

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate includes a conventional semiconductor substrate 180 that may be silicon, gallium arsenide or other semiconductor, or an insulator, such as glass or magnesium oxide (MgO).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com