About: http://webisa.webdatacommons.org/368079228

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The probe is then moved in the atomic order range of 1 ??m to 0.1 mm by another driving mechanism, such as a piezoelectric element or the like. (This movement is called fine movement).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com