About: http://webisa.webdatacommons.org/368091323

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sidewall spacer film 64 preferably has a similar etch ratio as the underlying etch stop layer 56 for a given etchant and may be a nitride or polysilicon or other suitable material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de