About: http://webisa.webdatacommons.org/368185741

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The various embodiments of the MEMS rotary structure described above can be employed in a wide variety of applications, including use as an actuator, a temperature sensor, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es