PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The exposing device 410 may be any device, system, component, or other apparatus configured to perform photolithographic transfer of patterns from a mask to a wafer by directing a light or other imaging energy towards the wafer through at least a portion of the mask.
http://www.w3.org/ns/prov#wasQuotedFrom
  • freepatentsonline.com