About: http://webisa.webdatacommons.org/368200169

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The automated system of claim 15, wherein said at least one manufacturing tool is a lithography tool.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com