About: http://webisa.webdatacommons.org/36829281

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Field of the Invention The present invention relates to apparatus and methods for thermally processing substrates, and in particular semiconductor substrates with integrated devices or circuits formed thereon. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca