About: http://webisa.webdatacommons.org/368324518

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inorganic materials such as silicon nitride, silicon oxide, and carbon (specifically a DLC film) can be used, and the barrier film can be formed by CVD, sputtering, or evaporation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com