About: http://webisa.webdatacommons.org/368391780

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may be deposited with a component of a physical sensing device, such as a magnetic sensor, optical sensor, temperature sensor, pressure sensor or gas flow sensor element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com