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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The portions of the upper Si substrate 1 in positions corresponding to the driving portions 41, 43, 45, 51, 53, and 55 are examples of the ???third portion??? in the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com