About: http://webisa.webdatacommons.org/36878358

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is an enlarged cross sectional view of a portion where a mass flow controller shown in FIG. 3 is fixed to the base plate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com