About: http://webisa.webdatacommons.org/368845408

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Planarization is a procedure where previously deposited material is removed from the feature side of a substrate to form a generally even, planar or level surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr