About: http://webisa.webdatacommons.org/369273322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 10, 11, 14, and 15, the wafer carrier 82 is a relatively flat component with no moving parts to generate particles within the sealed chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com