About: http://webisa.webdatacommons.org/36932209

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic illustration of the lithographic step-and-scan projection system of FIG. 1 scanning in a tilted wafer mode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com