| http://www.w3.org/ns/prov#value | - Argon gas flowing between about 100 sccm and about 1,000 sccm, such as between about 100 sccm and about 400 sccm, is continuously provided from the gas source 240 through each valve 242A, 242B. In one aspect, a pulse of TaF5 may still be in the chamber when a pulse of diborane or silane or disilane enters.
|
