About: http://webisa.webdatacommons.org/370152330

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	At this time, it is effective to perform plasma treatment by the use of gas that includes hydrogen, such as H2 or NH3, prior to the formation of the silicon nitride oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de