About: http://webisa.webdatacommons.org/370163753

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is also possible to use additional dopant gases such fluorine, boron, phosphorus or other dopants and deposit different films, such as silicon nitride or others, altogether.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com