| http://www.w3.org/ns/prov#value | - It will be described in detail with reference to FIGS. 53A to 53C later. [0273] As shown in FIGS. 47 and 52H, a metal layer for a data wire such as Ti or TiN is deposited and patterned to form a data line 600, a source electrode 610 and a drain electrode 620.
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