About: http://webisa.webdatacommons.org/370350195

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For fab production environments, the contaminant is thought to involve a photodeposition process as VUV light interacts with siloxanes, hydrocarbons, and other compounds common in fab environments.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com