| http://www.w3.org/ns/prov#value | - A layer of high thermal conductivity semi-insulating material 52 (for example Fe doped InP) is epitaxially grown on the substrate 51 preferably by Metal Oxide Chemical Vapor Deposition (MOCVD), however techniques such as Liquid Phase Epitaxy (LPE), Molecular Beam Epitaxy (MBE) and Chemical Beam Epitaxy (CBE) are also possible techniques.
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