| http://www.w3.org/ns/prov#value | - Alternatively, other plasma chemistries such as H2, H2O, H2O2, O3, CO, CO2, SO2, etc. may be used with or without gas additives like Ar or He. [0014] As an example, the following O2 plasma process may be used in a TEL DRM plasma reactor with dual chambers.
|
