About: http://webisa.webdatacommons.org/370813449

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For a silicon wafer, a material such as silicon nitride, tungsten or silicon carbide is suitable for this purpose.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com