About: http://webisa.webdatacommons.org/370889380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	CVD, while faster than PVD, typically requires decomposition of a film precursor or precursors including silicon and carbon sources which typically include hydrogen, thereby causing hydrogen to be incorporated into the film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com