About: http://webisa.webdatacommons.org/371016621

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph schematically illustrating oscillations in the operating temperatures measured by inner and outer thermocouples during a deposition phase of a CVD process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com