About: http://webisa.webdatacommons.org/371258273

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph showing wet etching rates of dielectric layers according to embodiments of the present invention in comparison with that of a standard thermal oxide layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com