About: http://webisa.webdatacommons.org/371290063

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart showing a process flow for a method of post-CMP cleaning to remove a CMP residue from a surface of an object in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es