About: http://webisa.webdatacommons.org/371589436

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	UPW is used in wafer production, standard wet cleans, and other wet processes such as some etch processes, solvent processes and chemical mechanical planarization (CMP), and rinses.
http://www.w3.org/ns/prov#wasQuotedFrom	wsppn.org