About: http://webisa.webdatacommons.org/371598841

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic cross sectional view showing a conventional half-tone type phase shift mask;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com