About: http://webisa.webdatacommons.org/37160352

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, the target tended to overheat during the sputtering operation, particularly if sputtering was carried out at too rapid a rate, thus limiting the production output of the apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au