About: http://webisa.webdatacommons.org/371621275

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Simultaneously, impurities such as organic substances adhering to the surface of the crystalline silicon film 110 are oxidized to be taken in the silicon oxide film 111 or burnt up.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca