About: http://webisa.webdatacommons.org/371661089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a plan view showing a manufacturing step of an optical module after a groove formation step, and FIG. 3B is a sectional view taken along the III???III section in FIG. 3A.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au