About: http://webisa.webdatacommons.org/371669309

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon nitride and silicon oxide have proved particularly favorable as a material for said layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca