About: http://webisa.webdatacommons.org/371783373

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A projection exposure apparatus according to claim 34, wherein said second reflecting mirror is a small reflecting mirror of a predetermined shape.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com