About: http://webisa.webdatacommons.org/37222838

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Again, where the second channel dielectric layer is of an oxide material, such as silicon oxide, the via stop layer is a nitride, such as silicon nitride, so the two layerscan be selectively etched.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com