About: http://webisa.webdatacommons.org/37259499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material gas, such as SiH4, Si2 H6, Si3 H8 or the like, for forming an insulating film is introduced into the reaction chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com