About: http://webisa.webdatacommons.org/37260767

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for patterning a surface of an article as claimed in claim 10 wherein the layer of resist material is a metal being selected from the group consisting of titanium, aluminum, nickel, copper, and chromium.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com