About: http://webisa.webdatacommons.org/372680414

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the surface of the wafer may be charged up depending on conditions such as the wafer material, energy of the irradiated electrons, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk