About: http://webisa.webdatacommons.org/372826561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To this end, low-k film is a key material in the narrow-spaced interconnects in LSI chips as it prevents undesired increases in parasitic capacitance.
http://www.w3.org/ns/prov#wasQuotedFrom	phys.org