About: http://webisa.webdatacommons.org/373013290

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plurality of through vias 648 are formed in the transducer substrate 640 and filled with conductive material such as aluminum or copper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr